4/8/2010	9:27:49 AM	Bypass valve closed
4/8/2010	9:27:49 AM	Main Vac valve closed
4/8/2010	9:28:05 AM	H2 MFC set to  500.000000
4/8/2010	9:28:10 AM	H2 valve opened
4/8/2010	9:28:29 AM	Tube furnace set to 1000
4/8/2010	9:29:34 AM	Bubbler valve opened
4/8/2010	9:31:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/8/2010	9:31:35 AM	Recipe started at 9:31 AM
4/8/2010	9:31:35 AM	Helium valve closed
4/8/2010	9:31:35 AM	H2 valve closed
4/8/2010	9:31:35 AM	BCl3 valve closed
4/8/2010	9:31:35 AM	PH3 valve closed
4/8/2010	9:31:35 AM	SiCl4 pre valve closed
4/8/2010	9:31:35 AM	SiCl4 post valve closed
4/8/2010	9:31:35 AM	Main Vac valve closed
4/8/2010	9:31:35 AM	Bypass valve closed
4/8/2010	9:31:35 AM	Bubbler valve closed
4/8/2010	9:31:35 AM	Helium MFC set to  0.000000
4/8/2010	9:31:35 AM	H2 MFC set to  0.000000
4/8/2010	9:31:35 AM	BCl3 MFC set to  0.000000
4/8/2010	9:31:35 AM	SiCl4 MFC set to  0.000000
4/8/2010	9:31:35 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:31:35 AM	Tube furnace set to 0
4/8/2010	9:31:35 AM	Run finished at 9:31 AM
4/8/2010	9:31:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/8/2010	9:32:21 AM	Recipe started at 9:32 AM
4/8/2010	9:32:21 AM	Helium valve closed
4/8/2010	9:32:21 AM	BCl3 valve closed
4/8/2010	9:32:21 AM	PH3 valve closed
4/8/2010	9:32:21 AM	SiCl4 pre valve closed
4/8/2010	9:32:21 AM	SiCl4 post valve closed
4/8/2010	9:32:21 AM	Main Vac valve closed
4/8/2010	9:32:21 AM	Bypass valve closed
4/8/2010	9:32:21 AM	Bubbler valve closed
4/8/2010	9:32:21 AM	H2 valve opened
4/8/2010	9:32:21 AM	Helium MFC set to  0.000000
4/8/2010	9:32:21 AM	H2 MFC set to  500.000000
4/8/2010	9:32:21 AM	BCl3 MFC set to  0.000000
4/8/2010	9:32:21 AM	SiCl4 MFC set to  0.000000
4/8/2010	9:32:21 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:32:21 AM	Tube furnace set to 1000
4/8/2010	9:32:21 AM	Helium valve closed
4/8/2010	9:32:21 AM	BCl3 valve closed
4/8/2010	9:32:21 AM	PH3 valve closed
4/8/2010	9:32:21 AM	SiCl4 pre valve closed
4/8/2010	9:32:21 AM	SiCl4 post valve closed
4/8/2010	9:32:21 AM	Main Vac valve closed
4/8/2010	9:32:21 AM	Bypass valve closed
4/8/2010	9:32:21 AM	H2 valve opened
4/8/2010	9:32:21 AM	Bubbler valve opened
4/8/2010	9:32:21 AM	Helium MFC set to  0.000000
4/8/2010	9:32:21 AM	H2 MFC set to  500.000000
4/8/2010	9:32:21 AM	BCl3 MFC set to  0.000000
4/8/2010	9:32:21 AM	SiCl4 MFC set to  0.000000
4/8/2010	9:32:21 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:32:21 AM	Tube furnace set to 1000
4/8/2010	9:48:33 AM	Helium valve closed
4/8/2010	9:48:33 AM	BCl3 valve closed
4/8/2010	9:48:33 AM	PH3 valve closed
4/8/2010	9:48:33 AM	Main Vac valve closed
4/8/2010	9:48:33 AM	Bypass valve closed
4/8/2010	9:48:33 AM	H2 valve opened
4/8/2010	9:48:33 AM	SiCl4 pre valve opened
4/8/2010	9:48:33 AM	SiCl4 post valve opened
4/8/2010	9:48:33 AM	Bubbler valve opened
4/8/2010	9:48:33 AM	Helium MFC set to  0.000000
4/8/2010	9:48:33 AM	H2 MFC set to  500.000000
4/8/2010	9:48:33 AM	BCl3 MFC set to  0.000000
4/8/2010	9:48:33 AM	SiCl4 MFC set to  325.000000
4/8/2010	9:48:33 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:48:33 AM	Tube furnace set to 1000
4/8/2010	9:52:13 AM	Helium valve closed
4/8/2010	9:52:13 AM	BCl3 valve closed
4/8/2010	9:52:13 AM	PH3 valve closed
4/8/2010	9:52:13 AM	SiCl4 pre valve closed
4/8/2010	9:52:13 AM	SiCl4 post valve closed
4/8/2010	9:52:13 AM	Main Vac valve closed
4/8/2010	9:52:13 AM	Bypass valve closed
4/8/2010	9:52:13 AM	H2 valve opened
4/8/2010	9:52:13 AM	Bubbler valve opened
4/8/2010	9:52:13 AM	Helium MFC set to  0.000000
4/8/2010	9:52:13 AM	H2 MFC set to  500.000000
4/8/2010	9:52:13 AM	BCl3 MFC set to  0.000000
4/8/2010	9:52:13 AM	SiCl4 MFC set to  0.000000
4/8/2010	9:52:13 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:52:14 AM	Tube furnace set to 0
4/8/2010	9:54:50 AM	H2 valve closed
4/8/2010	9:54:50 AM	BCl3 valve closed
4/8/2010	9:54:50 AM	PH3 valve closed
4/8/2010	9:54:50 AM	SiCl4 pre valve closed
4/8/2010	9:54:50 AM	SiCl4 post valve closed
4/8/2010	9:54:50 AM	Main Vac valve closed
4/8/2010	9:54:50 AM	Bypass valve closed
4/8/2010	9:54:50 AM	Helium valve opened
4/8/2010	9:54:50 AM	Bubbler valve opened
4/8/2010	9:54:50 AM	Helium MFC set to  500.000000
4/8/2010	9:54:50 AM	H2 MFC set to  0.000000
4/8/2010	9:54:50 AM	BCl3 MFC set to  0.000000
4/8/2010	9:54:50 AM	SiCl4 MFC set to  0.000000
4/8/2010	9:54:50 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:54:50 AM	Tube furnace set to 0
4/8/2010	10:14:50 AM	Helium valve closed
4/8/2010	10:14:50 AM	H2 valve closed
4/8/2010	10:14:50 AM	BCl3 valve closed
4/8/2010	10:14:50 AM	PH3 valve closed
4/8/2010	10:14:50 AM	SiCl4 pre valve closed
4/8/2010	10:14:50 AM	SiCl4 post valve closed
4/8/2010	10:14:50 AM	Main Vac valve closed
4/8/2010	10:14:50 AM	Bypass valve closed
4/8/2010	10:14:50 AM	Bubbler valve closed
4/8/2010	10:14:50 AM	Helium MFC set to  0.000000
4/8/2010	10:14:50 AM	H2 MFC set to  0.000000
4/8/2010	10:14:50 AM	BCl3 MFC set to  0.000000
4/8/2010	10:14:50 AM	SiCl4 MFC set to  0.000000
4/8/2010	10:14:50 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	10:14:50 AM	Tube furnace set to 0
4/8/2010	10:14:50 AM	Run finished at 10:14 AM
4/8/2010	10:15:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	10:15:15 AM	Recipe started at 10:15 AM
4/8/2010	10:15:15 AM	Helium valve closed
4/8/2010	10:15:15 AM	H2 valve closed
4/8/2010	10:15:15 AM	BCl3 valve closed
4/8/2010	10:15:15 AM	PH3 valve closed
4/8/2010	10:15:15 AM	SiCl4 pre valve closed
4/8/2010	10:15:15 AM	SiCl4 post valve closed
4/8/2010	10:15:15 AM	Main Vac valve closed
4/8/2010	10:15:15 AM	Bubbler valve closed
4/8/2010	10:15:15 AM	Bypass valve opened
4/8/2010	10:15:15 AM	Helium MFC set to  0.000000
4/8/2010	10:15:15 AM	H2 MFC set to  0.000000
4/8/2010	10:15:15 AM	BCl3 MFC set to  0.000000
4/8/2010	10:15:15 AM	SiCl4 MFC set to  0.000000
4/8/2010	10:15:15 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	10:15:15 AM	Tube furnace set to 0
4/8/2010	10:15:43 AM	Helium valve closed
4/8/2010	10:15:43 AM	H2 valve closed
4/8/2010	10:15:43 AM	BCl3 valve closed
4/8/2010	10:15:43 AM	PH3 valve closed
4/8/2010	10:15:43 AM	SiCl4 pre valve closed
4/8/2010	10:15:43 AM	SiCl4 post valve closed
4/8/2010	10:15:43 AM	Bubbler valve closed
4/8/2010	10:15:43 AM	Main Vac valve opened
4/8/2010	10:15:43 AM	Bypass valve opened
4/8/2010	10:15:43 AM	Helium MFC set to  0.000000
4/8/2010	10:15:43 AM	H2 MFC set to  0.000000
4/8/2010	10:15:43 AM	BCl3 MFC set to  0.000000
4/8/2010	10:15:43 AM	SiCl4 MFC set to  0.000000
4/8/2010	10:15:43 AM	Bypass solenoid MFC set to  0.000000
4/8/2010	10:15:43 AM	Tube furnace set to 0
4/8/2010	10:15:43 AM	Run finished at 10:15 AM
4/8/2010	10:15:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	3:33:42 PM	SiCl4 post valve opened
4/8/2010	3:33:56 PM	Bypass valve closed
4/8/2010	3:33:57 PM	Main Vac valve closed
4/8/2010	3:34:02 PM	Helium MFC set to  500.000000
4/8/2010	3:34:03 PM	Helium valve opened
4/8/2010	3:35:29 PM	Helium valve closed
4/8/2010	3:35:32 PM	Bypass valve opened
4/8/2010	3:36:01 PM	Main Vac valve opened
4/8/2010	3:37:31 PM	Helium valve opened
4/8/2010	3:37:43 PM	SiCl4 MFC set to  400.000000
4/8/2010	3:38:28 PM	SiCl4 pre valve opened
4/8/2010	3:42:37 PM	Program started after a nonstandard shutdown
4/8/2010	3:42:37 PM	Helium valve closed
4/8/2010	3:42:37 PM	H2 valve closed
4/8/2010	3:42:37 PM	BCl3 valve closed
4/8/2010	3:42:37 PM	PH3 valve closed
4/8/2010	3:42:37 PM	SiCl4 pre valve closed
4/8/2010	3:42:37 PM	SiCl4 post valve closed
4/8/2010	3:42:37 PM	Main Vac valve closed
4/8/2010	3:42:37 PM	Bypass valve closed
4/8/2010	3:42:37 PM	Bubbler valve closed
4/8/2010	3:42:37 PM	Helium MFC set to  0.000000
4/8/2010	3:42:37 PM	H2 MFC set to  0.000000
4/8/2010	3:42:37 PM	BCl3 MFC set to  0.000000
4/8/2010	3:42:37 PM	SiCl4 MFC set to  0.000000
4/8/2010	3:42:37 PM	Bypass solenoid MFC set to  760.000000
4/8/2010	3:42:37 PM	Error in setting the tube furnace  to 0
4/8/2010	3:42:46 PM	Program started after a nonstandard shutdown
4/8/2010	3:42:46 PM	Helium valve closed
4/8/2010	3:42:46 PM	H2 valve closed
4/8/2010	3:42:46 PM	BCl3 valve closed
4/8/2010	3:42:46 PM	PH3 valve closed
4/8/2010	3:42:46 PM	SiCl4 pre valve closed
4/8/2010	3:42:46 PM	SiCl4 post valve closed
4/8/2010	3:42:46 PM	Main Vac valve closed
4/8/2010	3:42:46 PM	Bypass valve closed
4/8/2010	3:42:46 PM	Bubbler valve closed
4/8/2010	3:42:46 PM	Helium MFC set to  0.000000
4/8/2010	3:42:46 PM	H2 MFC set to  0.000000
4/8/2010	3:42:46 PM	BCl3 MFC set to  0.000000
4/8/2010	3:42:46 PM	SiCl4 MFC set to  0.000000
4/8/2010	3:42:46 PM	Bypass solenoid MFC set to  760.000000
4/8/2010	3:42:46 PM	Tube furnace set to 0
4/8/2010	3:43:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	3:43:05 PM	Recipe started at 3:43 PM
4/8/2010	3:43:05 PM	Helium valve closed
4/8/2010	3:43:05 PM	H2 valve closed
4/8/2010	3:43:05 PM	BCl3 valve closed
4/8/2010	3:43:05 PM	PH3 valve closed
4/8/2010	3:43:05 PM	SiCl4 pre valve closed
4/8/2010	3:43:05 PM	SiCl4 post valve closed
4/8/2010	3:43:05 PM	Main Vac valve closed
4/8/2010	3:43:05 PM	Bubbler valve closed
4/8/2010	3:43:05 PM	Bypass valve opened
4/8/2010	3:43:05 PM	Helium MFC set to  0.000000
4/8/2010	3:43:05 PM	H2 MFC set to  0.000000
4/8/2010	3:43:05 PM	BCl3 MFC set to  0.000000
4/8/2010	3:43:05 PM	SiCl4 MFC set to  0.000000
4/8/2010	3:43:05 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	3:43:05 PM	Tube furnace set to 0
4/8/2010	3:43:05 PM	Helium valve closed
4/8/2010	3:43:05 PM	H2 valve closed
4/8/2010	3:43:05 PM	BCl3 valve closed
4/8/2010	3:43:05 PM	PH3 valve closed
4/8/2010	3:43:05 PM	SiCl4 pre valve closed
4/8/2010	3:43:05 PM	SiCl4 post valve closed
4/8/2010	3:43:05 PM	Bubbler valve closed
4/8/2010	3:43:05 PM	Main Vac valve opened
4/8/2010	3:43:05 PM	Bypass valve opened
4/8/2010	3:43:05 PM	Helium MFC set to  0.000000
4/8/2010	3:43:05 PM	H2 MFC set to  0.000000
4/8/2010	3:43:05 PM	BCl3 MFC set to  0.000000
4/8/2010	3:43:05 PM	SiCl4 MFC set to  0.000000
4/8/2010	3:43:05 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	3:43:05 PM	Tube furnace set to 0
4/8/2010	3:43:06 PM	Run finished at 3:43 PM
4/8/2010	3:43:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	3:59:17 PM	Program started after a nonstandard shutdown
4/8/2010	3:59:17 PM	Helium valve closed
4/8/2010	3:59:17 PM	H2 valve closed
4/8/2010	3:59:17 PM	BCl3 valve closed
4/8/2010	3:59:17 PM	PH3 valve closed
4/8/2010	3:59:17 PM	SiCl4 pre valve closed
4/8/2010	3:59:17 PM	SiCl4 post valve closed
4/8/2010	3:59:17 PM	Main Vac valve closed
4/8/2010	3:59:17 PM	Bypass valve closed
4/8/2010	3:59:17 PM	Bubbler valve closed
4/8/2010	3:59:17 PM	Helium MFC set to  0.000000
4/8/2010	3:59:17 PM	H2 MFC set to  0.000000
4/8/2010	3:59:17 PM	BCl3 MFC set to  0.000000
4/8/2010	3:59:17 PM	SiCl4 MFC set to  0.000000
4/8/2010	3:59:17 PM	Bypass solenoid MFC set to  760.000000
4/8/2010	4:01:36 PM	Program started after a nonstandard shutdown
4/8/2010	4:01:36 PM	There was an error trying to close the Helium valve.  It remains opened. 
4/8/2010	4:01:38 PM	There was an error trying to close the H2 valve.  It remains opened. 
4/8/2010	4:01:39 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
4/8/2010	4:01:40 PM	There was an error trying to close the PH3 valve.  It remains opened. 
4/8/2010	4:01:40 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
4/8/2010	4:01:40 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
4/8/2010	4:01:40 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
4/8/2010	4:01:40 PM	There was an error trying to close the Bypass valve.  It remains opened. 
4/8/2010	4:01:41 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
4/8/2010	4:01:41 PM	Error setting the  Helium MFC to 0.000000
4/8/2010	4:01:41 PM	Error setting the  H2 MFC to 0.000000
4/8/2010	4:01:42 PM	Error setting the  BCl3 MFC to 0.000000
4/8/2010	4:01:42 PM	Error setting the  SiCl4 MFC to 0.000000
4/8/2010	4:01:43 PM	Error setting the  Bypass solenoid MFC to 760.000000
4/8/2010	4:02:51 PM	Program started after a nonstandard shutdown
4/8/2010	4:02:52 PM	There was an error trying to close the Helium valve.  It remains opened. 
4/8/2010	4:02:52 PM	There was an error trying to close the H2 valve.  It remains opened. 
4/8/2010	4:02:53 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
4/8/2010	4:02:53 PM	There was an error trying to close the PH3 valve.  It remains opened. 
4/8/2010	4:02:53 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
4/8/2010	4:02:53 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
4/8/2010	4:02:54 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
4/8/2010	4:02:54 PM	There was an error trying to close the Bypass valve.  It remains opened. 
4/8/2010	4:02:54 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
4/8/2010	4:02:55 PM	Error setting the  Helium MFC to 0.000000
4/8/2010	4:02:56 PM	Error setting the  H2 MFC to 0.000000
4/8/2010	4:02:56 PM	Error setting the  BCl3 MFC to 0.000000
4/8/2010	4:02:57 PM	Error setting the  SiCl4 MFC to 0.000000
4/8/2010	4:02:57 PM	Error setting the  Bypass solenoid MFC to 760.000000
4/8/2010	4:05:51 PM	Program started after a nonstandard shutdown
4/8/2010	4:05:51 PM	Helium valve closed
4/8/2010	4:05:51 PM	H2 valve closed
4/8/2010	4:05:51 PM	BCl3 valve closed
4/8/2010	4:05:51 PM	PH3 valve closed
4/8/2010	4:05:51 PM	SiCl4 pre valve closed
4/8/2010	4:05:51 PM	SiCl4 post valve closed
4/8/2010	4:05:51 PM	Main Vac valve closed
4/8/2010	4:05:51 PM	Bypass valve closed
4/8/2010	4:05:51 PM	Bubbler valve closed
4/8/2010	4:05:51 PM	Helium MFC set to  0.000000
4/8/2010	4:05:51 PM	H2 MFC set to  0.000000
4/8/2010	4:05:51 PM	BCl3 MFC set to  0.000000
4/8/2010	4:05:51 PM	SiCl4 MFC set to  0.000000
4/8/2010	4:05:51 PM	Bypass solenoid MFC set to  760.000000
4/8/2010	4:05:51 PM	Tube furnace set to 0
4/8/2010	4:06:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	4:06:04 PM	Recipe started at 4:06 PM
4/8/2010	4:06:04 PM	Helium valve closed
4/8/2010	4:06:04 PM	H2 valve closed
4/8/2010	4:06:04 PM	BCl3 valve closed
4/8/2010	4:06:04 PM	PH3 valve closed
4/8/2010	4:06:04 PM	SiCl4 pre valve closed
4/8/2010	4:06:04 PM	SiCl4 post valve closed
4/8/2010	4:06:04 PM	Main Vac valve closed
4/8/2010	4:06:04 PM	Bubbler valve closed
4/8/2010	4:06:04 PM	Bypass valve opened
4/8/2010	4:06:04 PM	Helium MFC set to  0.000000
4/8/2010	4:06:04 PM	H2 MFC set to  0.000000
4/8/2010	4:06:04 PM	BCl3 MFC set to  0.000000
4/8/2010	4:06:04 PM	SiCl4 MFC set to  0.000000
4/8/2010	4:06:04 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	4:06:04 PM	Tube furnace set to 0
4/8/2010	4:06:04 PM	Helium valve closed
4/8/2010	4:06:04 PM	H2 valve closed
4/8/2010	4:06:04 PM	BCl3 valve closed
4/8/2010	4:06:04 PM	PH3 valve closed
4/8/2010	4:06:04 PM	SiCl4 pre valve closed
4/8/2010	4:06:04 PM	SiCl4 post valve closed
4/8/2010	4:06:04 PM	Bubbler valve closed
4/8/2010	4:06:04 PM	Main Vac valve opened
4/8/2010	4:06:04 PM	Bypass valve opened
4/8/2010	4:06:04 PM	Helium MFC set to  0.000000
4/8/2010	4:06:04 PM	H2 MFC set to  0.000000
4/8/2010	4:06:04 PM	BCl3 MFC set to  0.000000
4/8/2010	4:06:04 PM	SiCl4 MFC set to  0.000000
4/8/2010	4:06:04 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	4:06:05 PM	Tube furnace set to 0
4/8/2010	4:06:05 PM	Run finished at 4:06 PM
4/8/2010	4:06:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	4:06:38 PM	Helium MFC set to  500.000000
4/8/2010	4:06:40 PM	Main Vac valve closed
4/8/2010	4:06:46 PM	Helium valve opened
4/8/2010	4:07:04 PM	Helium valve closed
4/8/2010	4:07:05 PM	Helium valve opened
4/8/2010	4:07:23 PM	SiCl4 MFC set to  400.000000
4/8/2010	4:07:25 PM	SiCl4 pre valve opened
4/8/2010	4:07:27 PM	SiCl4 post valve opened
4/8/2010	4:07:31 PM	Main Vac valve opened
4/8/2010	4:11:57 PM	Main Vac valve closed
4/8/2010	4:11:59 PM	Bypass valve closed
4/8/2010	4:12:11 PM	Main Vac valve opened
4/8/2010	4:12:11 PM	Bypass valve opened
4/8/2010	4:12:26 PM	Main Vac valve closed
4/8/2010	4:12:27 PM	Bypass valve closed
4/8/2010	4:12:38 PM	Main Vac valve opened
4/8/2010	4:12:38 PM	Bypass valve opened
4/8/2010	4:23:52 PM	Main Vac valve closed
4/8/2010	4:23:53 PM	Bypass valve closed
4/8/2010	4:23:59 PM	SiCl4 MFC set to  400.000000
4/8/2010	4:24:10 PM	Helium valve closed
4/8/2010	4:24:10 PM	H2 valve closed
4/8/2010	4:24:10 PM	BCl3 valve closed
4/8/2010	4:24:10 PM	PH3 valve closed
4/8/2010	4:24:10 PM	SiCl4 pre valve closed
4/8/2010	4:24:10 PM	SiCl4 post valve closed
4/8/2010	4:24:10 PM	Main Vac valve closed
4/8/2010	4:24:10 PM	Bubbler valve closed
4/8/2010	4:24:10 PM	Bypass valve opened
4/8/2010	4:24:10 PM	Helium MFC set to  0.000000
4/8/2010	4:24:10 PM	H2 MFC set to  0.000000
4/8/2010	4:24:10 PM	BCl3 MFC set to  0.000000
4/8/2010	4:24:10 PM	SiCl4 MFC set to  0.000000
4/8/2010	4:24:10 PM	Bypass solenoid MFC set to  760.000000
4/8/2010	4:24:10 PM	Tube furnace set to 0
4/8/2010	4:24:10 PM	Baratron reads 1001.629466 Torr.  Emergency exit.
4/8/2010	4:24:17 PM	Program exited cleanly
4/8/2010	4:24:26 PM	Program started normally
4/8/2010	4:24:26 PM	Helium valve closed
4/8/2010	4:24:26 PM	H2 valve closed
4/8/2010	4:24:26 PM	BCl3 valve closed
4/8/2010	4:24:26 PM	PH3 valve closed
4/8/2010	4:24:26 PM	SiCl4 pre valve closed
4/8/2010	4:24:26 PM	SiCl4 post valve closed
4/8/2010	4:24:26 PM	Main Vac valve closed
4/8/2010	4:24:26 PM	Bypass valve closed
4/8/2010	4:24:26 PM	Bubbler valve closed
4/8/2010	4:24:26 PM	Helium MFC set to  0.000000
4/8/2010	4:24:26 PM	H2 MFC set to  0.000000
4/8/2010	4:24:26 PM	BCl3 MFC set to  0.000000
4/8/2010	4:24:26 PM	SiCl4 MFC set to  0.000000
4/8/2010	4:24:26 PM	Bypass solenoid MFC set to  760.000000
4/8/2010	4:24:26 PM	Tube furnace set to 0
4/8/2010	4:24:42 PM	Helium MFC set to  200.000000
4/8/2010	4:24:44 PM	Helium valve opened
4/8/2010	4:24:52 PM	Helium MFC set to  500.000000
4/8/2010	4:24:58 PM	SiCl4 MFC set to  200.000000
4/8/2010	4:25:00 PM	SiCl4 pre valve opened
4/8/2010	4:25:05 PM	SiCl4 post valve opened
4/8/2010	4:25:30 PM	SiCl4 MFC set to  400.000000
4/8/2010	4:26:00 PM	Bubbler valve opened
4/8/2010	4:26:16 PM	SiCl4 pre valve closed
4/8/2010	4:26:19 PM	SiCl4 post valve closed
4/8/2010	4:26:20 PM	SiCl4 post valve opened
4/8/2010	4:26:22 PM	SiCl4 post valve closed
4/8/2010	4:26:24 PM	SiCl4 pre valve opened
4/8/2010	4:26:25 PM	SiCl4 pre valve closed
4/8/2010	4:26:32 PM	Helium valve closed
4/8/2010	4:26:33 PM	Bubbler valve closed
4/8/2010	4:26:39 PM	Helium MFC set to  100.000000
4/8/2010	4:26:43 PM	Helium valve opened
4/8/2010	4:26:50 PM	Helium valve closed
4/8/2010	4:34:24 PM	Bypass valve opened
4/8/2010	4:34:53 PM	Main Vac valve opened
4/8/2010	6:54:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2010	6:54:53 PM	Recipe started at 6:54 PM
4/8/2010	6:54:53 PM	H2 valve closed
4/8/2010	6:54:53 PM	BCl3 valve closed
4/8/2010	6:54:53 PM	PH3 valve closed
4/8/2010	6:54:53 PM	SiCl4 pre valve closed
4/8/2010	6:54:53 PM	SiCl4 post valve closed
4/8/2010	6:54:53 PM	Main Vac valve closed
4/8/2010	6:54:53 PM	Bypass valve closed
4/8/2010	6:54:53 PM	Bubbler valve closed
4/8/2010	6:54:53 PM	Helium valve opened
4/8/2010	6:54:53 PM	Helium MFC set to  500.000000
4/8/2010	6:54:53 PM	H2 MFC set to  0.000000
4/8/2010	6:54:53 PM	BCl3 MFC set to  0.000000
4/8/2010	6:54:53 PM	SiCl4 MFC set to  0.000000
4/8/2010	6:54:53 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	6:54:53 PM	Tube furnace set to 0
4/8/2010	6:56:14 PM	Helium valve closed
4/8/2010	6:56:14 PM	H2 valve closed
4/8/2010	6:56:14 PM	BCl3 valve closed
4/8/2010	6:56:14 PM	PH3 valve closed
4/8/2010	6:56:14 PM	SiCl4 pre valve closed
4/8/2010	6:56:14 PM	SiCl4 post valve closed
4/8/2010	6:56:14 PM	Main Vac valve closed
4/8/2010	6:56:14 PM	Bypass valve closed
4/8/2010	6:56:14 PM	Bubbler valve closed
4/8/2010	6:56:14 PM	Helium MFC set to  0.000000
4/8/2010	6:56:14 PM	H2 MFC set to  0.000000
4/8/2010	6:56:14 PM	BCl3 MFC set to  0.000000
4/8/2010	6:56:14 PM	SiCl4 MFC set to  0.000000
4/8/2010	6:56:14 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	6:56:14 PM	Tube furnace set to 0
4/8/2010	6:56:14 PM	Run finished at 6:56 PM
4/8/2010	6:56:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2010	7:00:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	7:00:41 PM	Recipe started at 7:00 PM
4/8/2010	7:00:41 PM	Helium valve closed
4/8/2010	7:00:41 PM	H2 valve closed
4/8/2010	7:00:41 PM	BCl3 valve closed
4/8/2010	7:00:41 PM	PH3 valve closed
4/8/2010	7:00:41 PM	SiCl4 pre valve closed
4/8/2010	7:00:41 PM	SiCl4 post valve closed
4/8/2010	7:00:41 PM	Main Vac valve closed
4/8/2010	7:00:41 PM	Bubbler valve closed
4/8/2010	7:00:41 PM	Bypass valve opened
4/8/2010	7:00:41 PM	Helium MFC set to  0.000000
4/8/2010	7:00:41 PM	H2 MFC set to  0.000000
4/8/2010	7:00:41 PM	BCl3 MFC set to  0.000000
4/8/2010	7:00:41 PM	SiCl4 MFC set to  0.000000
4/8/2010	7:00:41 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	7:00:41 PM	Tube furnace set to 0
4/8/2010	7:01:14 PM	Helium valve closed
4/8/2010	7:01:14 PM	H2 valve closed
4/8/2010	7:01:14 PM	BCl3 valve closed
4/8/2010	7:01:14 PM	PH3 valve closed
4/8/2010	7:01:14 PM	SiCl4 pre valve closed
4/8/2010	7:01:14 PM	SiCl4 post valve closed
4/8/2010	7:01:14 PM	Bubbler valve closed
4/8/2010	7:01:14 PM	Main Vac valve opened
4/8/2010	7:01:14 PM	Bypass valve opened
4/8/2010	7:01:14 PM	Helium MFC set to  0.000000
4/8/2010	7:01:14 PM	H2 MFC set to  0.000000
4/8/2010	7:01:14 PM	BCl3 MFC set to  0.000000
4/8/2010	7:01:14 PM	SiCl4 MFC set to  0.000000
4/8/2010	7:01:14 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	7:01:14 PM	Tube furnace set to 0
4/8/2010	7:01:14 PM	Run finished at 7:01 PM
4/8/2010	7:01:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	7:58:23 PM	SiCl4 post valve opened
4/8/2010	7:58:48 PM	Bypass valve closed
4/8/2010	7:58:48 PM	Main Vac valve closed
4/8/2010	7:59:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2010	7:59:12 PM	Recipe started at 7:59 PM
4/8/2010	7:59:12 PM	H2 valve closed
4/8/2010	7:59:12 PM	BCl3 valve closed
4/8/2010	7:59:12 PM	PH3 valve closed
4/8/2010	7:59:12 PM	SiCl4 pre valve closed
4/8/2010	7:59:12 PM	SiCl4 post valve closed
4/8/2010	7:59:12 PM	Main Vac valve closed
4/8/2010	7:59:12 PM	Bypass valve closed
4/8/2010	7:59:12 PM	Bubbler valve closed
4/8/2010	7:59:12 PM	Helium valve opened
4/8/2010	7:59:12 PM	Helium MFC set to  500.000000
4/8/2010	7:59:12 PM	H2 MFC set to  0.000000
4/8/2010	7:59:12 PM	BCl3 MFC set to  0.000000
4/8/2010	7:59:12 PM	SiCl4 MFC set to  0.000000
4/8/2010	7:59:12 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	7:59:12 PM	Tube furnace set to 0
4/8/2010	8:00:39 PM	Helium valve closed
4/8/2010	8:00:39 PM	H2 valve closed
4/8/2010	8:00:39 PM	BCl3 valve closed
4/8/2010	8:00:39 PM	PH3 valve closed
4/8/2010	8:00:39 PM	SiCl4 pre valve closed
4/8/2010	8:00:39 PM	SiCl4 post valve closed
4/8/2010	8:00:39 PM	Main Vac valve closed
4/8/2010	8:00:39 PM	Bypass valve closed
4/8/2010	8:00:39 PM	Bubbler valve closed
4/8/2010	8:00:39 PM	Helium MFC set to  0.000000
4/8/2010	8:00:39 PM	H2 MFC set to  0.000000
4/8/2010	8:00:39 PM	BCl3 MFC set to  0.000000
4/8/2010	8:00:39 PM	SiCl4 MFC set to  0.000000
4/8/2010	8:00:39 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	8:00:39 PM	Tube furnace set to 0
4/8/2010	8:00:39 PM	Run finished at 8:00 PM
4/8/2010	8:00:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2010	8:00:43 PM	SiCl4 post valve opened
4/8/2010	8:00:46 PM	SiCl4 post valve closed
4/8/2010	8:00:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	8:00:49 PM	Recipe started at 8:00 PM
4/8/2010	8:00:49 PM	Helium valve closed
4/8/2010	8:00:49 PM	H2 valve closed
4/8/2010	8:00:49 PM	BCl3 valve closed
4/8/2010	8:00:49 PM	PH3 valve closed
4/8/2010	8:00:49 PM	SiCl4 pre valve closed
4/8/2010	8:00:49 PM	SiCl4 post valve closed
4/8/2010	8:00:49 PM	Main Vac valve closed
4/8/2010	8:00:49 PM	Bubbler valve closed
4/8/2010	8:00:49 PM	Bypass valve opened
4/8/2010	8:00:49 PM	Helium MFC set to  0.000000
4/8/2010	8:00:49 PM	H2 MFC set to  0.000000
4/8/2010	8:00:49 PM	BCl3 MFC set to  0.000000
4/8/2010	8:00:49 PM	SiCl4 MFC set to  0.000000
4/8/2010	8:00:49 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	8:00:49 PM	Tube furnace set to 0
4/8/2010	8:01:19 PM	Helium valve closed
4/8/2010	8:01:19 PM	H2 valve closed
4/8/2010	8:01:19 PM	BCl3 valve closed
4/8/2010	8:01:19 PM	PH3 valve closed
4/8/2010	8:01:19 PM	SiCl4 pre valve closed
4/8/2010	8:01:19 PM	SiCl4 post valve closed
4/8/2010	8:01:19 PM	Bubbler valve closed
4/8/2010	8:01:19 PM	Main Vac valve opened
4/8/2010	8:01:19 PM	Bypass valve opened
4/8/2010	8:01:19 PM	Helium MFC set to  0.000000
4/8/2010	8:01:19 PM	H2 MFC set to  0.000000
4/8/2010	8:01:19 PM	BCl3 MFC set to  0.000000
4/8/2010	8:01:19 PM	SiCl4 MFC set to  0.000000
4/8/2010	8:01:19 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	8:01:19 PM	Tube furnace set to 0
4/8/2010	8:01:19 PM	Run finished at 8:01 PM
4/8/2010	8:01:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	8:02:01 PM	SiCl4 MFC set to  100.000000
4/8/2010	8:02:08 PM	SiCl4 pre valve opened
4/8/2010	8:02:16 PM	SiCl4 pre valve closed
4/8/2010	8:02:19 PM	SiCl4 pre valve opened
4/8/2010	8:02:35 PM	SiCl4 pre valve closed
4/8/2010	8:03:09 PM	Tube furnace set to 1000
4/8/2010	8:04:06 PM	Bypass valve closed
4/8/2010	8:04:06 PM	Main Vac valve closed
4/8/2010	8:04:11 PM	H2 MFC set to  500.000000
4/8/2010	8:04:13 PM	H2 valve opened
4/8/2010	8:05:39 PM	Bubbler valve opened
4/8/2010	8:24:30 PM	SiCl4 pre valve opened
4/8/2010	8:24:30 PM	SiCl4 post valve opened
4/8/2010	8:26:13 PM	SiCl4 MFC set to  325.000000
4/8/2010	8:39:49 PM	Helium MFC set to  500.000000
4/8/2010	8:40:02 PM	SiCl4 pre valve closed
4/8/2010	8:40:02 PM	SiCl4 post valve closed
4/8/2010	8:40:03 PM	Helium valve opened
4/8/2010	8:40:04 PM	H2 valve closed
4/8/2010	8:40:06 PM	Tube furnace set to 0
4/8/2010	8:51:33 PM	Bubbler valve closed
4/8/2010	8:51:35 PM	Helium valve closed
4/8/2010	9:00:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	9:00:59 PM	Recipe started at 9:00 PM
4/8/2010	9:00:59 PM	Helium valve closed
4/8/2010	9:00:59 PM	H2 valve closed
4/8/2010	9:00:59 PM	BCl3 valve closed
4/8/2010	9:00:59 PM	PH3 valve closed
4/8/2010	9:00:59 PM	SiCl4 pre valve closed
4/8/2010	9:00:59 PM	SiCl4 post valve closed
4/8/2010	9:00:59 PM	Main Vac valve closed
4/8/2010	9:00:59 PM	Bubbler valve closed
4/8/2010	9:00:59 PM	Bypass valve opened
4/8/2010	9:00:59 PM	Helium MFC set to  0.000000
4/8/2010	9:00:59 PM	H2 MFC set to  0.000000
4/8/2010	9:00:59 PM	BCl3 MFC set to  0.000000
4/8/2010	9:00:59 PM	SiCl4 MFC set to  0.000000
4/8/2010	9:00:59 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:00:59 PM	Tube furnace set to 0
4/8/2010	9:01:30 PM	Helium valve closed
4/8/2010	9:01:30 PM	H2 valve closed
4/8/2010	9:01:30 PM	BCl3 valve closed
4/8/2010	9:01:30 PM	PH3 valve closed
4/8/2010	9:01:30 PM	SiCl4 pre valve closed
4/8/2010	9:01:30 PM	SiCl4 post valve closed
4/8/2010	9:01:30 PM	Bubbler valve closed
4/8/2010	9:01:30 PM	Main Vac valve opened
4/8/2010	9:01:30 PM	Bypass valve opened
4/8/2010	9:01:30 PM	Helium MFC set to  0.000000
4/8/2010	9:01:30 PM	H2 MFC set to  0.000000
4/8/2010	9:01:30 PM	BCl3 MFC set to  0.000000
4/8/2010	9:01:30 PM	SiCl4 MFC set to  0.000000
4/8/2010	9:01:30 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:01:30 PM	Tube furnace set to 0
4/8/2010	9:01:31 PM	Run finished at 9:01 PM
4/8/2010	9:01:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	9:02:00 PM	SiCl4 post valve opened
4/8/2010	9:03:57 PM	Bypass valve closed
4/8/2010	9:03:58 PM	Main Vac valve closed
4/8/2010	9:04:20 PM	Main Vac valve opened
4/8/2010	9:04:20 PM	Bypass valve opened
4/8/2010	9:05:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2010	9:05:16 PM	Recipe started at 9:05 PM
4/8/2010	9:05:16 PM	H2 valve closed
4/8/2010	9:05:16 PM	BCl3 valve closed
4/8/2010	9:05:16 PM	PH3 valve closed
4/8/2010	9:05:16 PM	SiCl4 pre valve closed
4/8/2010	9:05:16 PM	SiCl4 post valve closed
4/8/2010	9:05:16 PM	Main Vac valve closed
4/8/2010	9:05:16 PM	Bypass valve closed
4/8/2010	9:05:16 PM	Bubbler valve closed
4/8/2010	9:05:16 PM	Helium valve opened
4/8/2010	9:05:16 PM	Helium MFC set to  500.000000
4/8/2010	9:05:16 PM	H2 MFC set to  0.000000
4/8/2010	9:05:16 PM	BCl3 MFC set to  0.000000
4/8/2010	9:05:16 PM	SiCl4 MFC set to  0.000000
4/8/2010	9:05:16 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:05:16 PM	Tube furnace set to 0
4/8/2010	9:06:37 PM	Helium valve closed
4/8/2010	9:06:37 PM	H2 valve closed
4/8/2010	9:06:37 PM	BCl3 valve closed
4/8/2010	9:06:37 PM	PH3 valve closed
4/8/2010	9:06:37 PM	SiCl4 pre valve closed
4/8/2010	9:06:37 PM	SiCl4 post valve closed
4/8/2010	9:06:37 PM	Main Vac valve closed
4/8/2010	9:06:37 PM	Bypass valve closed
4/8/2010	9:06:37 PM	Bubbler valve closed
4/8/2010	9:06:37 PM	Helium MFC set to  0.000000
4/8/2010	9:06:37 PM	H2 MFC set to  0.000000
4/8/2010	9:06:37 PM	BCl3 MFC set to  0.000000
4/8/2010	9:06:37 PM	SiCl4 MFC set to  0.000000
4/8/2010	9:06:37 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:06:37 PM	Tube furnace set to 0
4/8/2010	9:06:37 PM	Run finished at 9:06 PM
4/8/2010	9:06:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2010	9:11:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	9:11:03 PM	Recipe started at 9:11 PM
4/8/2010	9:11:03 PM	Helium valve closed
4/8/2010	9:11:03 PM	H2 valve closed
4/8/2010	9:11:03 PM	BCl3 valve closed
4/8/2010	9:11:03 PM	PH3 valve closed
4/8/2010	9:11:03 PM	SiCl4 pre valve closed
4/8/2010	9:11:03 PM	SiCl4 post valve closed
4/8/2010	9:11:03 PM	Main Vac valve closed
4/8/2010	9:11:03 PM	Bubbler valve closed
4/8/2010	9:11:03 PM	Bypass valve opened
4/8/2010	9:11:03 PM	Helium MFC set to  0.000000
4/8/2010	9:11:03 PM	H2 MFC set to  0.000000
4/8/2010	9:11:03 PM	BCl3 MFC set to  0.000000
4/8/2010	9:11:03 PM	SiCl4 MFC set to  0.000000
4/8/2010	9:11:03 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:11:03 PM	Tube furnace set to 0
4/8/2010	9:11:19 PM	Helium valve closed
4/8/2010	9:11:19 PM	H2 valve closed
4/8/2010	9:11:19 PM	BCl3 valve closed
4/8/2010	9:11:19 PM	PH3 valve closed
4/8/2010	9:11:19 PM	SiCl4 pre valve closed
4/8/2010	9:11:19 PM	SiCl4 post valve closed
4/8/2010	9:11:19 PM	Bubbler valve closed
4/8/2010	9:11:19 PM	Main Vac valve opened
4/8/2010	9:11:19 PM	Bypass valve opened
4/8/2010	9:11:19 PM	Helium MFC set to  0.000000
4/8/2010	9:11:19 PM	H2 MFC set to  0.000000
4/8/2010	9:11:19 PM	BCl3 MFC set to  0.000000
4/8/2010	9:11:19 PM	SiCl4 MFC set to  0.000000
4/8/2010	9:11:19 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	9:11:19 PM	Tube furnace set to 0
4/8/2010	9:11:19 PM	Run finished at 9:11 PM
4/8/2010	9:11:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/8/2010	9:13:00 PM	SiCl4 post valve opened
4/8/2010	9:15:49 PM	Bypass valve closed
4/8/2010	9:15:50 PM	Main Vac valve closed
4/8/2010	9:16:09 PM	Bypass valve opened
4/8/2010	9:16:09 PM	Main Vac valve opened
4/8/2010	9:16:21 PM	SiCl4 MFC set to  500.000000
4/8/2010	9:16:28 PM	SiCl4 pre valve opened
4/8/2010	9:16:42 PM	Helium MFC set to  500.000000
4/8/2010	9:16:43 PM	Helium valve opened
4/8/2010	9:23:38 PM	Main Vac valve closed
4/8/2010	9:23:38 PM	Bypass valve closed
4/8/2010	9:24:24 PM	Main Vac valve opened
4/8/2010	9:24:25 PM	Bypass valve opened
4/8/2010	9:25:02 PM	Main Vac valve closed
4/8/2010	9:25:06 PM	Bypass valve closed
4/8/2010	9:25:13 PM	Bypass valve opened
4/8/2010	9:25:14 PM	Main Vac valve opened
4/8/2010	9:27:38 PM	SiCl4 post valve closed
4/8/2010	9:27:47 PM	SiCl4 post valve opened
4/8/2010	9:27:50 PM	SiCl4 pre valve closed
4/8/2010	9:27:57 PM	SiCl4 pre valve opened
4/8/2010	9:41:30 PM	Helium valve closed
4/8/2010	9:41:30 PM	SiCl4 pre valve closed
4/8/2010	9:41:37 PM	Helium MFC set to  100.000000
4/8/2010	9:41:41 PM	Helium MFC set to  0.000000
4/8/2010	9:42:21 PM	Bypass valve closed
4/8/2010	9:42:22 PM	Main Vac valve closed
4/8/2010	9:42:25 PM	Helium MFC set to  500.000000
4/8/2010	9:42:28 PM	Helium valve opened
4/8/2010	9:42:42 PM	SiCl4 MFC set to  100.000000
4/8/2010	9:42:43 PM	SiCl4 pre valve opened
4/8/2010	9:43:02 PM	Tube furnace set to 1000
4/8/2010	9:43:52 PM	Helium valve closed
4/8/2010	9:44:07 PM	SiCl4 post valve closed
4/8/2010	9:45:02 PM	Helium valve opened
4/8/2010	9:45:04 PM	Bubbler valve opened
4/8/2010	9:45:28 PM	SiCl4 pre valve closed
4/8/2010	9:46:06 PM	H2 MFC set to  500.000000
4/8/2010	9:46:09 PM	H2 valve opened
4/8/2010	9:46:09 PM	Helium valve closed
4/8/2010	9:46:27 PM	Helium MFC set to  0.000000
4/8/2010	10:00:58 PM	SiCl4 post valve opened
4/8/2010	10:00:58 PM	SiCl4 pre valve opened
4/8/2010	10:01:41 PM	SiCl4 MFC set to  325.000000
4/8/2010	10:04:25 PM	SiCl4 pre valve closed
4/8/2010	10:04:25 PM	SiCl4 post valve closed
4/8/2010	10:04:29 PM	SiCl4 MFC set to  0.000000
4/8/2010	10:05:09 PM	Tube furnace set to 0
4/8/2010	10:06:45 PM	Bubbler valve closed
4/8/2010	10:06:45 PM	Bubbler valve opened
4/8/2010	10:11:20 PM	Helium MFC set to  500.000000
4/8/2010	10:11:25 PM	Helium valve opened
4/8/2010	10:11:26 PM	H2 valve closed
4/8/2010	10:11:30 PM	H2 MFC set to  0.000000
4/8/2010	10:34:31 PM	Bubbler valve closed
4/8/2010	10:34:32 PM	Helium valve closed
4/8/2010	10:34:34 PM	Bypass valve opened
4/8/2010	10:34:37 PM	Helium MFC set to  0.000000
4/8/2010	10:35:05 PM	Main Vac valve opened
4/8/2010	11:41:38 PM	Main Vac valve closed
4/8/2010	11:41:39 PM	Bypass valve closed
4/8/2010	11:41:51 PM	Main Vac valve opened
4/8/2010	11:41:56 PM	Main Vac valve closed
4/8/2010	11:43:00 PM	Main Vac valve opened
4/8/2010	11:43:01 PM	Bypass valve opened
4/8/2010	11:44:23 PM	Bypass valve closed
4/8/2010	11:44:24 PM	Main Vac valve closed
4/8/2010	11:44:28 PM	Helium MFC set to  500.000000
4/8/2010	11:44:29 PM	Helium valve opened
4/8/2010	11:47:43 PM	Helium valve closed
4/8/2010	11:47:46 PM	Bypass valve opened
4/8/2010	11:48:02 PM	Main Vac valve opened
4/8/2010	11:49:07 PM	Main Vac valve closed
4/8/2010	11:49:07 PM	Bypass valve closed
4/8/2010	11:49:08 PM	Helium valve opened
4/8/2010	11:50:41 PM	Bubbler valve opened
4/8/2010	11:53:19 PM	Bubbler valve closed
4/8/2010	11:53:22 PM	Bubbler valve opened
4/8/2010	11:53:24 PM	Bubbler valve closed
4/8/2010	11:53:25 PM	Bubbler valve opened
4/8/2010	11:53:27 PM	Bubbler valve closed
4/8/2010	11:53:29 PM	Bubbler valve opened
4/8/2010	11:53:31 PM	Bubbler valve closed
4/8/2010	11:53:43 PM	Bubbler valve opened
4/8/2010	11:55:21 PM	Bubbler valve closed
4/8/2010	11:55:24 PM	Bubbler valve opened
4/8/2010	11:55:25 PM	Bubbler valve closed
4/8/2010	11:55:28 PM	Bubbler valve opened
4/8/2010	11:55:30 PM	Bubbler valve closed
4/8/2010	11:55:36 PM	Bubbler valve opened
4/8/2010	11:56:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/8/2010	11:56:49 PM	Recipe started at 11:56 PM
4/8/2010	11:56:49 PM	H2 valve closed
4/8/2010	11:56:49 PM	BCl3 valve closed
4/8/2010	11:56:49 PM	PH3 valve closed
4/8/2010	11:56:49 PM	SiCl4 pre valve closed
4/8/2010	11:56:49 PM	SiCl4 post valve closed
4/8/2010	11:56:49 PM	Main Vac valve closed
4/8/2010	11:56:49 PM	Bypass valve closed
4/8/2010	11:56:49 PM	Bubbler valve closed
4/8/2010	11:56:49 PM	Helium valve opened
4/8/2010	11:56:49 PM	Helium MFC set to  500.000000
4/8/2010	11:56:49 PM	H2 MFC set to  0.000000
4/8/2010	11:56:49 PM	BCl3 MFC set to  0.000000
4/8/2010	11:56:49 PM	SiCl4 MFC set to  0.000000
4/8/2010	11:56:49 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	11:56:49 PM	Tube furnace set to 0
4/8/2010	11:56:50 PM	Helium valve closed
4/8/2010	11:56:50 PM	H2 valve closed
4/8/2010	11:56:50 PM	BCl3 valve closed
4/8/2010	11:56:50 PM	PH3 valve closed
4/8/2010	11:56:50 PM	SiCl4 pre valve closed
4/8/2010	11:56:50 PM	SiCl4 post valve closed
4/8/2010	11:56:50 PM	Main Vac valve closed
4/8/2010	11:56:50 PM	Bypass valve closed
4/8/2010	11:56:50 PM	Bubbler valve closed
4/8/2010	11:56:50 PM	Helium MFC set to  0.000000
4/8/2010	11:56:50 PM	H2 MFC set to  0.000000
4/8/2010	11:56:50 PM	BCl3 MFC set to  0.000000
4/8/2010	11:56:50 PM	SiCl4 MFC set to  0.000000
4/8/2010	11:56:50 PM	Bypass solenoid MFC set to  0.000000
4/8/2010	11:56:50 PM	Tube furnace set to 0
4/8/2010	11:56:50 PM	Run finished at 11:56 PM
4/8/2010	11:56:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
